Quartz Wafer Saniya Kurun
Quartz wafer saniya kurun ye minɛn ye min bɛ kɛ ka wafer saniya semikɔndukiri dilanni taabolo la.
Fɛn min bɛ Kɛ: 99,99% quartz
Cogojirali
Suguya
- Funteni caman bɛ se ka kunbɛn
- A bɛ se ka sɔgɔsɔgɔ
- Aw bɛ se ka don a la
- Saniyali ka nɔgɔn
Aw bɛ baara kɛ ni a ye: aw bɛ yɔrɔ nɔgɔw bɔ
Aw bɛ a lajɛ ni semikɔndukiri puwɛntiw dilanni ka ɲi.
Waleyali
1. Sani ka di-Diffusion Saniya
A bɛ kɛ ka waferw ta ka tɛmɛ banbali ɲiginnenw fɛ walima ni u su ji la saniya fɛɛrɛw fɛ (misali la, RCA saniya) walasa ka nɔgɔw bɔ fɛnɲɛnamafagalanw, nɛgɛw ani fɛnɲɛnamafagalanw na ka sɔrɔ ka funteni caman jɛnsɛn walima ka oksidan kɛ.
2. Post-CMP (Planarisation mécanique chimique) saniya
A bɛ waferw minɛ saniya kɔfɛ-polishing waati la walasa ka sɔgɔsɔgɔninjɛ tolenw ni u sanfɛla nafamaw bɔ yen, ka a to u ka kɛ fla ye cogo ɲuman na litografi taabolo nataw kama.
3. Front-A laban-ka-Layini (FEOL) Fabrikasi
A bɛ baara kɛ FEOL saniya waati gɛlɛnw na, yɔrɔ minnu na yɔrɔ saniyalenw ka kan ka kɛ da la ɔkisidi falenni kama, epitaxial deposition, walima ion implantation kama.
4. Back-Dan-ka-Layini (BEOL) baarakɛcogo
A bɛ waferw dɛmɛ post-etch walima post{1}}deposition saniya waati la walasa ka photoresist, etch kɔfɛfɛnw, ani nɛgɛ nɔgɔlenw bɔ ɲɔgɔn na jɛɲɔgɔnya jɔli kɔfɛ.
5. Forobaciyɛnko ɲɛtaa
A bɛ wafer-nivo saniya nɔgɔya ka sɔrɔ ka dicing walima bonding kɛ 2.5D/3D IC pakew kɔnɔ, ka nɔgɔ-interfaces (interfaces) minnu tɛ nɔgɔ ye, olu sabati walasa ka jɛɲɔgɔnya dannamɔgɔ sɔrɔ.
6. Fɔtovoltaiki (Fotovoltaïque) ka fɛn dilanni
A bɛ kɛ tile selilɛri dilanni na walasa ka siliyɔmu substratw saniya, ka dugukolo sanfɛla jogo bonya walasa ka yeelen minɛ ka ɲɛ ani ka fanga caman tigɛli kɛ ka ɲɛ.
Bolo fɛnw
|
Farikolo-yɔrɔ-ko |
Nafaw (Nafaw). |
|
Saniya |
＞99.99% |
|
Hakɛ |
2,2g/cm ye3 |
|
Kɛnɛyako |
＞90% |
|
Mohs Gɛlɛya |
5.5--6.5 |
|
Deformation Point (yɔrɔ min bɛ fɛn caman sɛgɛsɛgɛ). |
1280 degere ye |
|
Point de Softening (Nɔgɔya yɔrɔ). |
1750 degere ye |
|
Point de Annealing (yɔrɔ min bɛ wele ko Annealing Point). |
1250 degere ye |
|
Specific Heat (20 - 350℃) |
670J/kg ye. dipilomu |
|
Sumaya sɛnɛcogo (20℃) . |
1,4W/m ye. dipilomu |
|
Funteni minɛcogo (w/mk,1000℃) . |
1.0-1.2 |
|
Index de réfraction (Index de réfraction) ye |
1.4585 |
|
Coefficient de l’expansion thermal (sɔgɔsɔgɔninjɛ min bɛ kɛ ni funteni ye). |
5.510 -7santimɛtɛrɛ/santimɛtɛrɛ. dipilomu |
|
Hot - baarakɛcogo Temperature |
1750--2050 degɛrɛ |
|
Waati kunkurunnin - Baara Funteni |
1450 degere ye |
|
Waati jan - Baara Funteni |
1100 degere ye |
|
Kimisɛriw ka nafaw |
Nafaw (Nafaw). |
|
A bɛ se ka asidi sɔrɔ |
Asidi barikama(n’a ma fɔ HF),Alkali barikama, jilama organique |
|
Funteni caman bɛ se ka sɔgɔsɔgɔ |
Ɲuman ɲuman |
|
Nɛgɛ nɔgɔlen Kɔnɔkow |
<5 ppm ye |
|
Kuranko nafaw |
Nafaw (Nafaw). |
|
Resistivity (Kɛlɛli) (Resistivity). |
7107Ω.cm ye |
|
Insulasi fanga |
250 ~ 400Kv / santimɛtɛrɛ |
|
Constant Diélectrique (Dielectrique) ye |
3.7~3.9 |
|
Coefficient d’absorption diélectrique (Dielektriki (Dielectric Absorption Coefficient)) ye |
＜410-4 |
|
Dielektriki bɔnɛ Coefficient |
＜110-4 |
|
Masinaw ka jogo |
Nafaw (Nafaw). |
|
Fanga min bɛ degun |
1100MPa ye |
|
Kɔrɔta fanga |
67MPa ye |
|
Tensile (Tensile) fanga |
48MPa ye |
|
Poisson ka jatebɔ |
0.14~0.17 |
|
Young ka Modulus (Modulus) ye |
72000MPa ye |
|
Modulus de cisaillement (Modulus de cisaillement) ye |
31000MPa ye |
Saniya fɛɛrɛw
Saniya min bɛ kɛ ni jisuma ye:
Aw bɛ wafer bila saniya kurun kɔnɔ, o kɔ aw bɛ saniya kurun su saniyaji la, ka dɔ fara saniyaji ni wafer sanfɛla cɛ jɛɲɔgɔnya kan ni wafer kurun kɔrɔta ye walasa ka saniya nɔ ɲɛ.
Saniya ni furaji ye:
Aw bɛ saniya kurun jɔ ka jɔ fiyɛlan kɔnɔ, ka sɔrɔ ka saniyaji fiyɛ wafer sanfɛ walasa ka nɔgɔw bɔ a la. A ye
Kurunw saniya nafa:
- Aw ye aw jija wafer saniya la: Wafer yɔrɔ saniyalen nafa ka bon kosɛbɛ semikɔndukiri puwɛntiw dilanni cogoya la, wa saniya kurun jɔyɔrɔ ka bon saniya baara la.
- Aw bɛ a lajɛ ni semikɔndukiri puwɛntiw ka dannaya ye : Aw bɛ puwɛntiw ka dannaya sabati ani ka dɔ bɔ fɛn dilannenw ka filiw la ni aw bɛ yɔrɔ nɔgɔw bɔ.
- Aw bɛ semikɔndukiri puwɛntiw sɔrɔcogo ɲɛ: Aw bɛ waferw saniyacogo ɲɛ, o la, semikɔndukiri puwɛntiw sɔrɔli bɛ ɲɛ.
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